Carbon nanotubes (CNT)

Carbon nanotubes (CNT) for interconnect applications as a new technology approach for replacement of copper in vias. The deposition of high-quality CNTs by low-temperature CVD with different catalyst materials, structural and electrical characterization of CNTs, and process integration into the complete technology flow of an interconnect system are research topics in that field (see to article "CNTs for interconnect and sensor applications").

More information

• Scientific report: Integration of Carbon Nanotubes in Interconnect Systems and Sensors